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MIT EECS Professor Duane S. Boning

Professor Duane S. Boning

Affiliated lab(s): MTL
email: boning@mtl.mit.edu  
phone: (617) 253-0931  
address: 38-435

title:

Professor of Electrical Engineering and Computer Science, Associate Department Head

 

url:

 
http://mtlweb.mit.edu/~boning/
 

research interests:

 
   

Semiconductor manufacturing. Metrology and modeling of IC and MEMS process, device and circuit variation. Computer tools and systems for statistical design for manufacturability.

 

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